Inventor
SUZUKI NOBUMASA
JP40 patents
⚠️ This page may combine multiple inventors who share the name “SUZUKI NOBUMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
31 patentsUS6497783B1Dec 24, 2002
Plasma processing apparatus provided with microwave applicator having annular waveguide and processing method
CANON KK89 citations96
US5803975ASep 8, 1998
Microwave plasma processing apparatus and method therefor
CANON KK59 citations96
US5753320AMay 19, 1998
Process for forming deposited film
CANON KK73 citations96
US5538699AJul 23, 1996
Microwave introducing device provided with an endless circular waveguide and plasma treating apparatus provided with said device
CANON KK48 citations96
US5487875AJan 30, 1996
Microwave introducing device provided with an endless circular waveguide and plasma treating apparatus provided with said device
CANON KK47 citations96
US6652709B1Nov 25, 2003
Plasma processing apparatus having circular waveguide, and plasma processing method
CANON KK62 citations94
US6238527B1May 29, 2001
Thin film forming apparatus and method of forming thin film of compound by using the same
CANON KK66 citations94
US5433787AJul 18, 1995
Apparatus for forming deposited film including light transmissive diffusion plate
CANON KK87 citations94
US5803974ASep 8, 1998
Chemical vapor deposition apparatus
CANON KK21 citations93
US6677549B2Jan 13, 2004
Plasma processing apparatus having permeable window covered with light shielding film
CANON KK21 citations92
US6080679AJun 27, 2000
High-speed soft evacuation process and system
CANON KK38 citations92
US5985091ANov 16, 1999
Microwave plasma processing apparatus and microwave plasma processing method
CANON KK29 citations92
US5565247AOct 15, 1996
Process for forming a functional deposited film
CANON KK29 citations92
US5585148ADec 17, 1996
Process for forming a deposited film using a light transmissive perforated diffusion plate
CANON KK26 citations91
US6870123B2Mar 22, 2005
Microwave applicator, plasma processing apparatus having same, and plasma processing method
CANON KK23 citations90
US6829279B1Dec 7, 2004
Laser oscillating apparatus, exposure apparatus using the same and device fabrication method
CANON KK13 citations84
US5983829ANov 16, 1999
Microwave plasma etching apparatus
CANON KK18 citations84
US5707692AJan 13, 1998
Apparatus and method for processing a base substance using plasma and a magnetic field
CANON KK19 citations84
US6884318B2Apr 26, 2005
Plasma processing system and surface processing method
CANON KK7 citations74
US6744802B1Jun 1, 2004
Laser oscillating apparatus with slotted waveguide
CANON KK8 citations74
US6541982B2Apr 1, 2003
Plasma density measuring method and apparatus, and plasma processing system using the same
CANON KK12 citations74
US6007878ADec 28, 1999
Process for producing an optical recording medium having a protective layer formed using a plasma processing device
CANON KK10 citations74
US5681394AOct 28, 1997
Photo-excited processing apparatus and method for manufacturing a semiconductor device by using the same
CANON KK16 citations74
US6650678B1Nov 18, 2003
Laser oscillating apparatus
CANON KK5 citations63
US5368647ANov 29, 1994
Photo-excited processing apparatus for manufacturing a semiconductor device that uses a cylindrical reflecting surface
CANON KK4 citations63
US5223039AJun 29, 1993
Illuminating apparatus and photo-excited process apparatus using same
CANON KK6 citations63
US6916678B2Jul 12, 2005
Surface modification method
CANON KK5 citations62
US5975012ANov 2, 1999
Deposition apparatus
CANON KK4 citations61
US7982381B2Jul 19, 2011
Electron source and image display apparatus
CANON KK0 citations52
US6801554B1Oct 5, 2004
Laser oscillating apparatus, exposure apparatus, and device fabrication method
CANON KK1 citations52
US8012822B2Sep 6, 2011
Process for forming dielectric films
CANON KK1 citations51
SHOWA IKA KOGYO CO LTD
3 patentsTOSOH CORP
3 patentsUS5248827ASep 28, 1993
Process for producing an ethylenamine
TOSOH CORP26 citations90
US4982003AJan 1, 1991
Mixed oxide catalyst and process for producing an alkylenamine by using the catalyst
TOSOH CORP21 citations82
US5073649ADec 17, 1991
Process for producing a polyalkylene polyamine
TOSOH CORP1 citations52