Inventor

SUMMERFELT SCOTT R

US156 patents

⚠️ This page may combine multiple inventors who share the name “SUMMERFELT SCOTT R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMMERFELT SCOTT R

TEXAS INSTRUMENTS INC

FeRAM capacitor post stack etch clean/repair

Method of forming dual metal gate structures or CMOS devices

Method and structure for etching a thin film perovskite layer

Conductive exotic-nitride barrier layer for high-dielectric-constant material electrodes

High-dielectric-constant material electrodes comprising thin ruthenium dioxide layers

Method of making conductive amorphous-nitride barrier layer for high-dielectric-constant material electrodes

High-dielectric-constant material electrodes comprising thin platinum layers

High-dielectric-constant material electrodes comprising thin platinum layers

Conductive exotic-nitride barrier layer for high-dielectric-constant materials

Electrode interface for high-dielectric-constant materials

Protection of tungsten alignment mark for FeRAM processing

Methods of preventing reduction of IrOx during PZT formation by metalorganic chemical vapor deposition or other processing

Integrated circuit and method

Adhesion promoting sacrificial etch stop layer in advanced capacitor structures

Semiconductor structures using high-dielectric-constant materials and an adhesion layer

Method of forming high-dielectric-constant material electrodes comprising sidewall spacers

FeRAM sidewall diffusion barrier etch

Hydrogen-free contact etch for ferroelectric capacitor formation

FeRAM capacitor stack etch

High permittivity silicate gate dielectric

Hardmask designs for dry etching FeRAM capacitor stacks

Integrated circuit and method

Electrical connections to dielectric materials

Metal patterning with adhesive hardmask layer

Method for forming integrated circuit capacitor and memory

Fabricating high-dielectric constant oxides on semiconductors using a GE buffer layer

Conductive amorphous-nitride barrier layer for high dielectric-constant material electrodes

Conductive noble-metal-insulator-alloy barrier layer for high-dielectric-constant material electrodes

Conductive exotic-nitride barrier layer for high-dielectric-constant material electrodes

Method of forming conductive amorphous-nitride barrier layer for high-dielectric-constant material electrodes

High-dielectric-constant material electrodes comprising sidewall spacers

Pb/Bi-containing high-dielectric constant oxides using a non-Pb/Bi-containing perovskite as a buffer layer

Method of forming high-dielectric-constant material electrodes comprising conductive sidewall spacers of same material as electrodes

Electrodes comprising conductive perovskite-seed layers for perovskite dielectrics

High-dielectric-constant material electrodes comprising thin platinum layers

Pre-oxidizing high-dielectric-constant material electrodes

Pre-oxidizing high-dielectric-constant material electrodes

Electrodes for high dielectric constant materials

High-dielectric constant oxides on semiconductors using a Ge buffer layer

Pb/Bi-containing high-dielectric constant oxides using a non-P/Bi-containing perovskite as a buffer layer

Method of forming electrical connections to high dielectric constant materials

Method of fabricating high-dielectric constant oxides on semiconductors using a GE buffer layer

Anisotropic metal oxide etch

Method of forming conductive noble-metal-insulator-alloy barrier layer for high-dielectric-constant material electrodes

Method of forming conductive noble-metal-insulator-alloy barrier layer for high-dielectric-constant material electrodes

Electrode interface for high-dielectric-constant materials

ADVANCED TECH MATERIALS

Sputtering process for the conformal deposition of a metallization or insulating layer

Diffusion barriers between noble metal electrodes and metallization layers, and integrated circuit and semiconductor devices comprising same

SUMMERFELT SCOTT R

Enhanced local interconnects employing ferroelectric electrodes

AGILENT TECHNOLOGIES INC

Method of fabricating a ferroelectric memory cell