Inventor
KIM SAM H
US10 patents
⚠️ This page may combine multiple inventors who share the name “KIM SAM H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6825447B2Nov 30, 2004
Apparatus and method for uniform substrate heating and contaminate collection
APPLIED MATERIALS INC32 citations88
US7007919B2Mar 7, 2006
Slit valve method and apparatus
APPLIED MATERIALS INC13 citations81
US11293099B2Apr 5, 2022
Showerhead assembly with multiple fluid delivery zones
APPLIED MATERIALS INC1 citations73
US10233543B2Mar 19, 2019
Showerhead assembly with multiple fluid delivery zones
APPLIED MATERIALS INC4 citations73
US10669629B2Jun 2, 2020
Showerhead assembly with multiple fluid delivery zones
APPLIED MATERIALS INC0 citations52