Inventor

WITTY DEREK

US2 patents

⚠️ This page may combine multiple inventors who share the name “WITTY DEREK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

XU HUIWEN

1 patent

US8445075B2May 21, 2013

Method to minimize wet etch undercuts and provide pore sealing of extreme low k (k<2.5) dielectrics

XU HUIWEN517 citations98

APPLIED MATERIALS INC

1 patent

US7425716B2Sep 16, 2008

Method and apparatus for reducing charge density on a dielectric coated substrate after exposure to a large area electron beam

APPLIED MATERIALS INC14 citations82

WITTY DEREK

XU HUIWEN

Method to minimize wet etch undercuts and provide pore sealing of extreme low k (k&lt;2.5) dielectrics

APPLIED MATERIALS INC

Method and apparatus for reducing charge density on a dielectric coated substrate after exposure to a large area electron beam

Method to minimize wet etch undercuts and provide pore sealing of extreme low k (k<2.5) dielectrics