P

Inventor

WATANABE MASAHIRO

JP480 patents
⚠️ This page may combine multiple inventors who share the name “WATANABE MASAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

18 patents
US6107637AAug 22, 2000

Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus

HITACHI LTD147 citations99
US5986263ANov 16, 1999

Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same

HITACHI LTD164 citations99
US6865288B1Mar 8, 2005

Pattern inspection method and apparatus

HITACHI LTD75 citations98
US6465781B1Oct 15, 2002

Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatus

HITACHI LTD85 citations97
US5677755AOct 14, 1997

Method and apparatus for pattern exposure, mask used therefor, and semiconductor integrated circuit produced by using them

HITACHI LTD147 citations97
US5231567AJul 27, 1993

Manufacturing planning system

HITACHI LTD134 citations97
US7692144B2Apr 6, 2010

Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus

HITACHI LTD42 citations96
US6952492B2Oct 4, 2005

Method and apparatus for inspecting a semiconductor device

HITACHI LTD50 citations96
US6753518B2Jun 22, 2004

Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus

HITACHI LTD35 citations96
US6614923B1Sep 2, 2003

Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof

HITACHI LTD49 citations96
US6347150B1Feb 12, 2002

Method and system for inspecting a pattern

HITACHI LTD52 citations96
US6335532B1Jan 1, 2002

Convergent charged particle beam apparatus and inspection method using same

HITACHI LTD38 citations96
US6333510B1Dec 25, 2001

Electron beam exposure or system inspection of measurement apparatus and its method and height detection apparatus

HITACHI LTD44 citations96
US6172365B1Jan 9, 2001

Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same

HITACHI LTD48 citations96
US6087673AJul 11, 2000

Method of inspecting pattern and apparatus thereof

HITACHI LTD58 citations96
US6040029AMar 21, 2000

Glass substrate of disk for recording information, a disk for recording information, and a disk device for recording information

HITACHI LTD42 citations96
US5357439AOct 18, 1994

Custom-made manufacturing system and custom-made manufacturing method

HITACHI LTD118 citations96
US5479343ADec 26, 1995

Production planning system

HITACHI LTD90 citations95

TANAKA PRECIOUS METAL IND

7 patents

CANON KK

7 patents

MAKITA CORP

6 patents

ISHIHARA MINING & CHEMICAL CO

3 patents

TIGER CORP

2 patents

WATANABE MASAHIRO

2 patents

SUZUKI HITOSHI

1 patent

HITACHI HIGH TECH CORP

1 patent

JAPAN RES DEV CORP

1 patent

HITACHI HIGH TECH FINE SYSTEMS CORP

1 patent

SEMICONDUCTOR ENERGY LAB

1 patent

Showing the top 50 of 480 patents by PatentIndex Score.