P

Inventor

GORIN GEORGES J

US14 patents
⚠️ This page may combine multiple inventors who share the name “GORIN GEORGES J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TEGAL CORP

4 patents
US4464223AAug 7, 1984

Plasma reactor apparatus and method

TEGAL CORP275 citations98
US4209357AJun 24, 1980

Plasma reactor apparatus

TEGAL CORP415 citations97
US4579618AApr 1, 1986

Plasma reactor apparatus

TEGAL CORP543 citations95
US4357195ANov 2, 1982

Apparatus for controlling a plasma reaction

TEGAL CORP36 citations92

GORIN GEORGES J

4 patents
US10588212B1Mar 10, 2020

Plasma initiation in an inductive RF coupling mode

GORIN GEORGES J3 citations71
US8841574B1Sep 23, 2014

Plasma extension and concentration apparatus and method

GORIN GEORGES J4 citations71
US9386677B1Jul 5, 2016

Plasma concentration apparatus and method

GORIN GEORGES J2 citations61
US8852522B1Oct 7, 2014

Plasma de-activation apparatus and method

GORIN GEORGES J2 citations61

DRY PLASMA SYSTEMS INC

3 patents
US6263831B1Jul 24, 2001

Downstream plasma using oxygen gas mixtures

DRY PLASMA SYSTEMS INC27 citations91
US6112696ASep 5, 2000

Downstream plasma using oxygen gas mixture

DRY PLASMA SYSTEMS INC17 citations91
US7015415B2Mar 21, 2006

Higher power density downstream plasma

DRY PLASMA SYSTEMS INC5 citations61

MOTOROLA INC

2 patents
US4264393AApr 28, 1981

Reactor apparatus for plasma etching or deposition

MOTOROLA INC103 citations95
US4263088AApr 21, 1981

Method for process control of a plasma reaction

MOTOROLA INC82 citations95

PIVOTAL SYSTEMS CORP

1 patent
US7871830B2Jan 18, 2011

End point detection method for plasma etching of semiconductor wafers with low exposed area

PIVOTAL SYSTEMS CORP9 citations74