Inventor
WILMOT FREDERICK D
US8 patents
⚠️ This page may combine multiple inventors who share the name “WILMOT FREDERICK D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
5 patentsUS10023970B2Jul 17, 2018
Dynamic current distribution control apparatus and method for wafer electroplating
NOVELLUS SYSTEMS INC4 citations72
US9822461B2Nov 21, 2017
Dynamic current distribution control apparatus and method for wafer electroplating
NOVELLUS SYSTEMS INC4 citations72
US10435807B2Oct 8, 2019
Lipseals and contact elements for semiconductor electroplating apparatuses
NOVELLUS SYSTEMS INC5 citations71
US10053792B2Aug 21, 2018
Plating cup with contoured cup bottom
NOVELLUS SYSTEMS INC0 citations51
US9816196B2Nov 14, 2017
Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte
NOVELLUS SYSTEMS INC1 citations48