Inventor
HILL ERIC
US27 patents
⚠️ This page may combine multiple inventors who share the name “HILL ERIC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
13 patentsUS10053774B2Aug 21, 2018
Reactor system for sublimation of pre-clean byproducts and method thereof
ASM IP HOLDING BV444 citations99
US9890456B2Feb 13, 2018
Method and system for in situ formation of gas-phase compounds
ASM IP HOLDING BV466 citations99
USD793352SAug 1, 2017
Getter plate
ASM IP HOLDING BV474 citations99
US10770336B2Sep 8, 2020
Substrate lift mechanism and reactor including same
ASM IP HOLDING BV286 citations98
US11018047B2May 25, 2021
Hybrid lift pin
ASM IP HOLDING BV9 citations84
US10519541B2Dec 31, 2019
Reactor system for sublimation of pre-clean byproducts and method thereof
ASM IP HOLDING BV2 citations73
US11053585B2Jul 6, 2021
Reactor system for sublimation of pre-clean byproducts and method thereof
ASM IP HOLDING BV0 citations62
US11015245B2May 25, 2021
Gas-phase reactor and system having exhaust plenum and components thereof
ASM IP HOLDING BV1 citations62
US10787741B2Sep 29, 2020
Method and system for in situ formation of gas-phase compounds
ASM IP HOLDING BV1 citations62
US12040217B2Jul 16, 2024
Substrate lift mechanism and reactor including same
ASM IP HOLDING BV0 citations61
US11587821B2Feb 21, 2023
Substrate lift mechanism and reactor including same
ASM IP HOLDING BV0 citations61
US12043899B2Jul 23, 2024
Reactor system and method to reduce residue buildup during a film deposition process
ASM IP HOLDING BV0 citations60
US11390950B2Jul 19, 2022
Reactor system and method to reduce residue buildup during a film deposition process
ASM IP HOLDING BV0 citations60