Inventor
SU TAI-CHI
US4 patents
⚠️ This page may combine multiple inventors who share the name “SU TAI-CHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
3 patentsUS6800530B2Oct 5, 2004
Triple layer hard mask for gate patterning to fabricate scaled CMOS transistors
IBM16 citations82
US7514370B2Apr 7, 2009
Compressive nitride film and method of manufacturing thereof
IBM6 citations72
US7851376B2Dec 14, 2010
Compressive nitride film and method of manufacturing thereof
IBM0 citations51