Inventor
FUKUMURA YUKI
JP7 patents
Patents
7 patentsUS11372329B2Jun 28, 2022
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD4 citations71
US11099479B2Aug 24, 2021
Resist composition, method of forming resist pattern, polymeric compound, and copolymer
TOKYO OHKA KOGYO CO LTD2 citations71
US10394122B2Aug 27, 2019
Resist composition, method for forming resist pattern, compound, and acid generator
TOKYO OHKA KOGYO CO LTD6 citations71
US10261416B2Apr 16, 2019
Resist composition and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD1 citations61
US11204551B2Dec 21, 2021
Resist composition and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations51
US11747726B2Sep 5, 2023
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations50
US10241406B2Mar 26, 2019
Resist composition and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations40