Inventor
HALBMAIER DAVID L
US10 patents
⚠️ This page may combine multiple inventors who share the name “HALBMAIER DAVID L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
6 patentsUS6926017B2Aug 9, 2005
Wafer container washing apparatus
ENTEGRIS INC25 citations92
US7328727B2Feb 12, 2008
Substrate container with fluid-sealing flow passageway
ENTEGRIS INC32 citations91
US7400383B2Jul 15, 2008
Environmental control in a reticle SMIF pod
ENTEGRIS INC43 citations89
US7216655B2May 15, 2007
Wafer container washing apparatus
ENTEGRIS INC15 citations84
US7325698B2Feb 5, 2008
Wafer container door with particulate collecting structure
ENTEGRIS INC11 citations83
US9745119B2Aug 29, 2017
Reticle pod
ENTEGRIS INC8 citations81