Inventor
CORLISS DANIEL
US10 patents
Patents
10 patentsUS10347486B1Jul 9, 2019
Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography
IBM5 citations83
US11037786B2Jun 15, 2021
Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography
IBM2 citations72
US11288429B2Mar 29, 2022
Electrical mask validation
IBM0 citations62
US11177130B2Nov 16, 2021
Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography
IBM0 citations62
US10921715B2Feb 16, 2021
Semiconductor structure for optical validation
IBM1 citations62
US10650111B2May 12, 2020
Electrical mask validation
IBM1 citations62
US10429743B2Oct 1, 2019
Optical mask validation
IBM1 citations62
US11462512B2Oct 4, 2022
Three-dimensional microelectronic package with embedded cooling channels
IBM0 citations61
US10937764B2Mar 2, 2021
Three-dimensional microelectronic package with embedded cooling channels
IBM1 citations61
US10921716B1Feb 16, 2021
Lithographic dose characterization
IBM0 citations50