Inventor
BASU ATASHI
US20 patents
⚠️ This page may combine multiple inventors who share the name “BASU ATASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
18 patentsUS10319636B2Jun 11, 2019
Deposition and treatment of films for patterning
APPLIED MATERIALS INC21 citations94
US10608097B2Mar 31, 2020
Low thickness dependent work-function nMOS integration for metal gate
APPLIED MATERIALS INC2 citations73
US11621160B2Apr 4, 2023
Doped and undoped vanadium oxides for low-k spacer applications
APPLIED MATERIALS INC0 citations62
US11094533B2Aug 17, 2021
Doped and undoped vanadium oxides for low-k spacer applications
APPLIED MATERIALS INC0 citations62
US11078224B2Aug 3, 2021
Precursors for the atomic layer deposition of transition metals and methods of use
APPLIED MATERIALS INC0 citations62
US11049722B2Jun 29, 2021
Methods and materials for modifying the threshold voltage of metal oxide stacks
APPLIED MATERIALS INC0 citations62
US10510546B2Dec 17, 2019
Schemes for selective deposition for patterning applications
APPLIED MATERIALS INC1 citations62
US10347495B2Jul 9, 2019
Schemes for selective deposition for patterning applications
APPLIED MATERIALS INC1 citations62
US11515151B2Nov 29, 2022
Methods and precursors for selective deposition of metal films
APPLIED MATERIALS INC1 citations60
US11332488B2May 17, 2022
Metal precursors with modified diazabutadiene ligands for CVD and ALD and methods of use
APPLIED MATERIALS INC0 citations60
US10373823B2Aug 6, 2019
Deployment of light energy within specific spectral bands in specific sequences for deposition, treatment and removal of materials
APPLIED MATERIALS INC1 citations60
US10170321B2Jan 1, 2019
Aluminum content control of TiAIN films
APPLIED MATERIALS INC1 citations60
US11887847B2Jan 30, 2024
Methods and precursors for selective deposition of metal films
APPLIED MATERIALS INC0 citations59
US10811250B2Oct 20, 2020
Silicon nitride films with high nitrogen content
APPLIED MATERIALS INC0 citations52
US10699952B2Jun 30, 2020
Deposition and treatment of films for patterning
APPLIED MATERIALS INC0 citations52
US10475642B2Nov 12, 2019
Doped and undoped vanadium oxides for low-k spacer applications
APPLIED MATERIALS INC0 citations52
US10615041B2Apr 7, 2020
Methods and materials for modifying the threshold voltage of metal oxide stacks
APPLIED MATERIALS INC0 citations51
US10752649B2Aug 25, 2020
Metal precursors with modified diazabutadiene ligands for CVD and ALD and methods of use
APPLIED MATERIALS INC0 citations50