Inventor
SHIGENOBU ATSUSHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “SHIGENOBU ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
7 patentsUS8741510B2Jun 3, 2014
Method of calculating amount of fluctuation of imaging characteristic of projection optical system, exposure apparatus, and method of fabricating device
CANON KK4 citations65
US11061337B2Jul 13, 2021
Exposure apparatus and article manufacturing method
CANON KK0 citations50
US12130562B2Oct 29, 2024
Method of obtaining array of plurality of regions on substrate, exposure apparatus, method of manufacturing article, non-transitory storage medium, and information processing apparatus
CANON KK0 citations48
US9116444B2Aug 25, 2015
Method of calculating amount of fluctuation of imaging characteristic of projection optical system, exposure apparatus, and method of fabricating device
CANON KK0 citations44
US11947267B2Apr 2, 2024
Method of obtaining array of plurality of shot regions on substrate, exposure method, exposure apparatus, method of manufacturing article, non-transitory computer-readable storage medium, and information processing apparatus
CANON KK0 citations41
US7643125B2Jan 5, 2010
Exposure apparatus and device manufacturing method
CANON KK0 citations38
US11199784B2Dec 14, 2021
Exposure apparatus and article manufacturing method
CANON KK0 citations36