Inventor
TSUJIYAMA MASASHI
JP7 patents
Patents
7 patentsUS10879040B2Dec 29, 2020
Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly
CANON ANELVA CORP2 citations71
US12505979B2Dec 23, 2025
Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly
CANON ANELVA CORP0 citations60
US12119203B2Oct 15, 2024
Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly
CANON ANELVA CORP0 citations60
US11355314B2Jun 7, 2022
Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly
CANON ANELVA CORP0 citations60
US10224179B2Mar 5, 2019
Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly
CANON ANELVA CORP0 citations50
US9721747B2Aug 1, 2017
Grid, method of manufacturing the same, and ion beam processing apparatus
CANON ANELVA CORP0 citations50
US11508545B2Nov 22, 2022
Grid assembly and ion beam etching apparatus
CANON ANELVA CORP0 citations43