Inventor
PAVELCHEK EDWARD K
US20 patents
⚠️ This page may combine multiple inventors who share the name “PAVELCHEK EDWARD K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHIPLEY CO LLC
16 patentsUS6261743B1Jul 17, 2001
Antireflective coating compositions comprising photoacid generators
SHIPLEY CO LLC107 citations98
US5939236AAug 17, 1999
Antireflective coating compositions comprising photoacid generators
SHIPLEY CO LLC222 citations98
US6410209B1Jun 25, 2002
Methods utilizing antireflective coating compositions with exposure under 200 nm
SHIPLEY CO LLC108 citations97
US6316165B1Nov 13, 2001
Planarizing antireflective coating compositions
SHIPLEY CO LLC105 citations97
US6890448B2May 10, 2005
Antireflective hard mask compositions
SHIPLEY CO LLC45 citations96
US6887648B2May 3, 2005
Antireflective coating compositions
SHIPLEY CO LLC44 citations96
US6767689B2Jul 27, 2004
Antireflective coating compositions
SHIPLEY CO LLC57 citations96
US6653049B2Nov 25, 2003
High conformality antireflective coating compositions
SHIPLEY CO LLC63 citations96
US6190839B1Feb 20, 2001
High conformality antireflective coating compositions
SHIPLEY CO LLC54 citations96
US6602652B2Aug 5, 2003
Antireflective coating compositions and exposure methods under 200 nm
SHIPLEY CO LLC44 citations95
US6855466B2Feb 15, 2005
Planarizing antireflective coating compositions
SHIPLEY CO LLC27 citations92
US6461717B1Oct 8, 2002
Aperture fill
SHIPLEY CO LLC27 citations92
US6749765B2Jun 15, 2004
Aperture fill
SHIPLEY CO LLC15 citations84
US7018717B2Mar 28, 2006
Antireflective hard mask compositions
SHIPLEY CO LLC8 citations74
US7026101B2Apr 11, 2006
Antireflective coating compositions
SHIPLEY CO LLC4 citations63
US7147983B1Dec 12, 2006
Dyed photoresists and methods and articles of manufacture comprising same
SHIPLEY CO LLC2 citations61