Inventor
BOZKURT MURAT
NL13 patents
⚠️ This page may combine multiple inventors who share the name “BOZKURT MURAT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
12 patentsUS10437163B2Oct 8, 2019
Method and apparatus for design of a metrology target
ASML NETHERLANDS BV7 citations83
US10481506B2Nov 19, 2019
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV7 citations82
US11385553B2Jul 12, 2022
Metrology method, patterning device, apparatus and computer program
ASML NETHERLANDS BV2 citations72
US10996570B2May 4, 2021
Metrology method, patterning device, apparatus and computer program
ASML NETHERLANDS BV2 citations72
US9940703B2Apr 10, 2018
Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV4 citations72
US9633427B2Apr 25, 2017
Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV2 citations72
US10859923B2Dec 8, 2020
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV2 citations71
US11698346B2Jul 11, 2023
Methods and apparatus for monitoring a manufacturing process, inspection apparatus, lithographic system, device manufacturing method
ASML NETHERLANDS BV2 citations67
US11003099B2May 11, 2021
Method and apparatus for design of a metrology target
ASML NETHERLANDS BV0 citations62
US10564552B2Feb 18, 2020
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV1 citations61
US10794693B2Oct 6, 2020
Metrology method, apparatus and computer program
ASML NETHERLANDS BV0 citations49
US10705437B2Jul 7, 2020
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS BV0 citations38