Inventor
DA COSTA ASSAFRAO ALBERTO
NL7 patents
Patents
7 patentsUS10551750B2Feb 4, 2020
Metrology method and apparatus and associated computer product
ASML NETHERLANDS BV2 citations68
US11698346B2Jul 11, 2023
Methods and apparatus for monitoring a manufacturing process, inspection apparatus, lithographic system, device manufacturing method
ASML NETHERLANDS BV2 citations67
US11022892B2Jun 1, 2021
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV0 citations60
US10466594B2Nov 5, 2019
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV1 citations60
US11009345B2May 18, 2021
Metrology method, apparatus, and computer program to determine a representative sensitivity coefficient
ASML NETHERLANDS BV0 citations59
US10310388B2Jun 4, 2019
Metrology method and apparatus and associated computer product
ASML NETHERLANDS BV1 citations57
US10705437B2Jul 7, 2020
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS BV0 citations38