Inventor

NAKAHASHI SATOSHI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “NAKAHASHI SATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NUFLARE TECHNOLOGY INC

3 patents

US9147552B2Sep 29, 2015

Charged particle beam writing method and charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC7 citations79

US11749491B2Sep 5, 2023

Electron beam writing apparatus and cathode life span prediction method

NUFLARE TECHNOLOGY INC0 citations58

US11352694B2Jun 7, 2022

Drawing apparatus and control method thereof

NUFLARE TECHNOLOGY INC0 citations46

NISHIMURA RIEKO

1 patent

US8748064B2Jun 10, 2014

Charged particle beam drawing method and charged particle beam drawing apparatus

NISHIMURA RIEKO3 citations53