Inventor

COSS JR ELFIDO

US65 patents

⚠️ This page may combine multiple inventors who share the name “COSS JR ELFIDO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

COSS JR ELFIDO

ADVANCED MICRO DEVICES INC

Method and apparatus for embedded process control framework in tool systems

Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework

Fault notification based on a severity level

Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework

Method and apparatus for dynamically monitoring system components in an advanced process control (APC) framework

Identifying a cause of a fault based on a process controller output

Method and apparatus for monitoring tool health

Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework

Method and apparatus for implementing corrected species by monitoring specific state parameters

Integrated wafer stocker and sorter with integrity verification system

Flow control in a semiconductor fabrication facility

Automated material handling system method and arrangement

System and method for managing empty carriers in an automated material handling system

Automated material handling system for a manufacturing facility divided into separate fabrication areas

Method and apparatus for scheduled controller execution based upon impending lot arrival at a processing tool in an APC framework

Managing a semiconductor fabrication facility using wafer lot and cassette attributes

Automated material handling system method and arrangement

Electrode reshaping in a semiconductor etching device

Routing workpieces based upon detecting a fault

Conflict resolution among multiple controllers

Method and apparatus for performing fault detection using data from a database

Process control based upon a metrology delay

Integration of business rule parameters in priority setting of wafer processing

Wafer rotation randomization for process defect detection in semiconductor fabrication

Integrated reticle sorter and stocker

Automated wafer transfer system

Determination of a process flow based upon fault detection analysis

Method for requesting trace data reports from FDC semiconductor fabrication processes

Method and apparatus for using latency time as a run-to-run control parameter

Predicting process excursions based upon tool state variables

Wafer fabrication system providing measurement data screening

Method and apparatus for fault detection classification of multiple tools based upon external data

Method of dynamically designing a preventative maintenance schedule based upon sensor data, and system for accomplishing same

Adjusting a trace data rate based upon a tool state

Method and apparatus for determining wafer identity and orientation

Method and apparatus for identifying the position of a selected semiconductor die relative to other dice formed from the same semiconductor wafer

Determining a possible cause of a fault in a semiconductor fabrication process

Method and apparatus for aligning wafers

Automated system for extracting and combining tool trace data and wafer electrical test (WET) data for semiconductor processing

Fault detection system with real-time database

Operating a processing tool in a degraded mode upon detecting a fault

Method and apparatus for generating real-time data from static files

Reticle stocking and sorting management system

Managing test material in an automated material handling system

Apparatus for the non-contact manipulation of a semiconductor die

Method and apparatus for controlling wafer thickness uniformity in a multi-zone vertical furnace

ADVANCE MICRO DEVICES INC

Management of multiple types of empty carriers in automated material handling systems

Scheduling method for automated work-cell transfer system

(unassigned)

Updating process controller based upon fault detection analysis

COSS JR ELFIDO

Associating data with workpieces and correlating the data with yield data