Inventor
WANG JEN-TI
TW17 patents
Patents
17 patentsUS10861692B2Dec 8, 2020
Substrate carrier deterioration detection and repair
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12050153B2Jul 30, 2024
Method for monitoring transport vehicle and maintenance thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US11848221B2Dec 19, 2023
Method of storing workpiece using workpiece storage system
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations67
US10161033B2Dec 25, 2018
Method for cleaning load port of wafer processing apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations67
US12162134B2Dec 10, 2024
System with substrate carrier deterioration detection and repair
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11584019B2Feb 21, 2023
Substrate carrier deterioration detection and repair
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11605553B2Mar 14, 2023
Method and apparatus for unpacking semiconductor wafer container
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11854844B2Dec 26, 2023
Method of operating transport system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11367637B2Jun 21, 2022
Method of operating transport system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12062561B2Aug 13, 2024
Method for transporting wafers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11348817B2May 31, 2022
Wafer transport system and method for transporting wafers
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations57
US11437258B2Sep 6, 2022
Workpiece storage system, method of storing workpiece, and method of transferring workpiece using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US10867823B2Dec 15, 2020
Fault detection method in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10840121B2Nov 17, 2020
Method and apparatus for unpacking semiconductor wafer container
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10618534B2Apr 14, 2020
Monitor vehicle for a rail system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10464583B2Nov 5, 2019
Monitor vehicle for a rail system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10804124B2Oct 13, 2020
Wafer processing tool capable of detecting wafer warpage and method for detecting wafer warpage
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45