Inventor
KIM JINSEOB
KR7 patents
Patents
7 patentsUS12347096B2Jul 1, 2025
Semiconductor measurement apparatus
SAMSUNG ELECTRONICS CO LTD2 citations73
US12002698B2Jun 4, 2024
Metrology apparatus and method based on diffraction using oblique illumination and method of manufacturing semiconductor device using the metrology method
SAMSUNG ELECTRONICS CO LTD4 citations71
US12228499B2Feb 18, 2025
Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method
SAMSUNG ELECTRONICS CO LTD0 citations60
US11604136B2Mar 14, 2023
Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method
SAMSUNG ELECTRONICS CO LTD0 citations60
US12455228B2Oct 28, 2025
Semiconductor measurement apparatus
SAMSUNG ELECTRONICS CO LTD0 citations48
US12422245B2Sep 23, 2025
Semiconductor measurement apparatus
SAMSUNG ELECTRONICS CO LTD0 citations46
US11898912B2Feb 13, 2024
Hyperspectral imaging (HSI) apparatus and inspection apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations45