Inventor

OOAEH YOSHIHISA

JP13 patents

Patents

13 patents

US5854490ADec 29, 1998

Charged-particle-beam exposure device and charged-particle-beam exposure method

FUJITSU LTD46 citations96

US5814423ASep 29, 1998

Transmission mask for charged particle beam exposure apparatuses, and an exposure apparatus using such a transmission mask

FUJITSU LTD57 citations96

US6420700B2Jul 16, 2002

Charged-particle-beam exposure device and charged-particle-beam exposure method

FUJITSU LTD15 citations92

US6242751B1Jun 5, 2001

Charged-particle-beam exposure device and charged-particle-beam exposure method

FUJITSU LTD33 citations92

US6055719AMay 2, 2000

Method for manufacturing an electrostatic deflector

FUJITSU LTD22 citations92

US5981960ANov 9, 1999

Charged particle beam exposure method and apparatus therefor

FUJITSU LTD36 citations92

US5969365AOct 19, 1999

Charged-particle-beam exposure device and charged-particle-beam exposure method

FUJITSU LTD20 citations92

US5866300AFeb 2, 1999

Method of and system for exposing pattern on object by charged particle beam

FUJITSU LTD25 citations92

US5770862AJun 23, 1998

Charged particle exposure apparatus, and a charged particle exposure method

FUJITSU LTD20 citations92

US5757015AMay 26, 1998

Charged-particle-beam exposure device and charged-particle-beam exposure method

FUJITSU LTD25 citations92

US5949078ASep 7, 1999

Charged-particle-beam exposure device and charged-particle-beam exposure method

FUJITSU LTD16 citations80

US6057907AMay 2, 2000

Method of and system for exposing pattern on object by charged particle beam

FUJITSU LTD12 citations74

US5872366AFeb 16, 1999

Charged-particle-beam exposure device and charged-particle-beam exposure method

FUJITSU LTD5 citations71