Inventor
KAWAKAMI KENICHI
JP27 patents
⚠️ This page may combine multiple inventors who share the name “KAWAKAMI KENICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
10 patentsUS6222195B1Apr 24, 2001
Charged-particle-beam exposure device and charged-particle-beam exposure method
FUJITSU LTD49 citations96
US6420700B2Jul 16, 2002
Charged-particle-beam exposure device and charged-particle-beam exposure method
FUJITSU LTD15 citations92
US6242751B1Jun 5, 2001
Charged-particle-beam exposure device and charged-particle-beam exposure method
FUJITSU LTD33 citations92
US6137111AOct 24, 2000
Charged particle-beam exposure device and charged-particle-beam exposure method
FUJITSU LTD26 citations92
US5969365AOct 19, 1999
Charged-particle-beam exposure device and charged-particle-beam exposure method
FUJITSU LTD20 citations92
US5892237AApr 6, 1999
Charged particle beam exposure method and apparatus
FUJITSU LTD28 citations92
US5830612ANov 3, 1998
Method of detecting a deficiency in a charged-particle-beam exposure mask
FUJITSU LTD28 citations92
US5757015AMay 26, 1998
Charged-particle-beam exposure device and charged-particle-beam exposure method
FUJITSU LTD25 citations92
US5966200AOct 12, 1999
Charged particle beam exposure apparatus
FUJITSU LTD7 citations72
US6015975AJan 18, 2000
Method and apparatus for charged particle beam exposure
FUJITSU LTD10 citations70
TORAY INDUSTRIES
3 patentsADVANTEST CORP
2 patentsSHARP KK
2 patentsUS6947611B2Sep 20, 2005
System, method and program for perspective projection image creation, and recording medium storing the same program
SHARP KK14 citations84
US7058235B2Jun 6, 2006
Imaging systems, program used for controlling image data in same system, method for correcting distortion of captured image in same system, and recording medium storing procedures for same method
SHARP KK15 citations78