Inventor
NAGAI RYU
JP5 patents
Patents
5 patentsUS12580154B2Mar 17, 2026
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations58
US12072693B2Aug 27, 2024
Analysis device and analysis method
TOKYO ELECTRON LTD0 citations58
US12347651B2Jul 1, 2025
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations49
US12563987B2Feb 24, 2026
Plasma processing method and plasma processing system
TOKYO ELECTRON LTD0 citations42
US12494354B2Dec 9, 2025
Substrate processing system, information processing apparatus, and information processing method for dynamic control of substrate plasma processing
TOKYO ELECTRON LTD0 citations42