Inventor
HARIYA HIDEKI
JP3 patents
Patents
3 patentsUS10119193B2Nov 6, 2018
Method of manufacturing an epitaxial wafer comprising measuring a level difference between a front surface of a susceptor and an upper surface of a lift pin and adjusting a ratio of the heat source output
SHINETSU HANDOTAI KK4 citations67
US5785764AJul 28, 1998
Susceptor for a gas phase growth apparatus
SHINETSU HANDOTAI KK14 citations66
US8021968B2Sep 20, 2011
Susceptor and method for manufacturing silicon epitaxial wafer
SHINETSU HANDOTAI KK5 citations60