Inventor

KOGUCHI TOSHIAKI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KOGUCHI TOSHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ANELVA CORP

2 patents

US6432261B2Aug 13, 2002

Plasma etching system

ANELVA CORP34 citations89

US7182122B2Feb 27, 2007

Heating and cooling apparatus, and vacuum processing apparatus equipped with this apparatus

ANELVA CORP12 citations82

CANON ANELVA CORP

1 patent

US7886808B2Feb 15, 2011

Heating and cooling apparatus, and vacuum processing apparatus equipped with this apparatus

CANON ANELVA CORP1 citations50