P

Inventor

TAKAHASHI KAZUO

JP221 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHASHI KAZUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

28 patents
US6012966AJan 11, 2000

Precision polishing apparatus with detecting means

CANON KK118 citations99
US5610683AMar 11, 1997

Immersion type projection exposure apparatus

CANON KK1,933 citations99
US4503335AMar 5, 1985

Semiconductor printing apparatus with multiple independent temperature control

CANON KK184 citations99
US6183345B1Feb 6, 2001

Polishing apparatus and method

CANON KK103 citations98
US6179695B1Jan 30, 2001

Chemical mechanical polishing apparatus and method

CANON KK72 citations96
US6135858AOct 24, 2000

Substrate holding device and polishing method and polishing apparatus using the same

CANON KK79 citations96
US4766465AAug 23, 1988

Carry device for fine movement

CANON KK98 citations96
US4937618AJun 26, 1990

Alignment and exposure apparatus and method for manufacture of integrated circuits

CANON KK57 citations95
US6352469B1Mar 5, 2002

Polishing apparatus with slurry screening

CANON KK27 citations93
US6162112ADec 19, 2000

Chemical-mechanical polishing apparatus and method

CANON KK42 citations93
US6152805ANov 28, 2000

Polishing machine

CANON KK48 citations93
US6023068AFeb 8, 2000

Semiconductor device manufacturing apparatus

CANON KK47 citations93
US4843563AJun 27, 1989

Step-and-repeat alignment and exposure method and apparatus

CANON KK29 citations93
US4659225AApr 21, 1987

Pattern exposure apparatus with distance measuring system

CANON KK45 citations93
US4488806ADec 18, 1984

Shot arranging method in a divisional printing apparatus

CANON KK31 citations93
US6776691B2Aug 17, 2004

Polishing/cleaning method as well as method of making a wiring section using a polishing apparatus

CANON KK26 citations92
US6332835B1Dec 25, 2001

Polishing apparatus with transfer arm for moving polished object without drying it

CANON KK40 citations92
US6312316B1Nov 6, 2001

Chemical mechanical polishing apparatus and method

CANON KK16 citations92
US6165050ADec 26, 2000

Method of manufacturing semiconductor device using precision polishing apparatus with detecting means

CANON KK22 citations92
US6149500ANov 21, 2000

Precision polishing method using hermetically sealed chambers

CANON KK18 citations92
US6120349ASep 19, 2000

Polishing system

CANON KK32 citations92
US6093081AJul 25, 2000

Polishing method and polishing apparatus using the same

CANON KK27 citations92
US5904611AMay 18, 1999

Precision polishing apparatus

CANON KK20 citations92
US5365342ANov 15, 1994

Alignment and exposure apparatus and method for manufacture of integrated circuits

CANON KK28 citations92
US5050111ASep 17, 1991

Alignment and exposure apparatus and method for manufacture of integrated circuits

CANON KK31 citations92
US4874954AOct 17, 1989

Projection exposure apparatus

CANON KK36 citations92
US4869481ASep 26, 1989

Plate-like article holding device

CANON KK33 citations92
US4825247AApr 25, 1989

Projection exposure apparatus

CANON KK98 citations92

TERARECON INC

4 patents

SONY CORP

4 patents

TAKAHASHI KAZUO

3 patents

PIONEER ELECTRONIC CORP

2 patents

TOYOTA MOTOR CO LTD

2 patents

PIONEER CORP

2 patents

DAINIPPON PRINTING CO LTD

1 patent

TAKAHASHI KIYOSHI

1 patent

SANYO ELECTRIC CO

1 patent

(unassigned)

1 patent

TDK CORP

1 patent

Showing the top 50 of 221 patents by PatentIndex Score.