Inventor
TURNER FREDERICK T
US12 patents
⚠️ This page may combine multiple inventors who share the name “TURNER FREDERICK T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN ASSOCIATES
10 patentsUS5281320AJan 25, 1994
Wafer coating system
VARIAN ASSOCIATES46 citations95
US4166783ASep 4, 1979
Deposition rate regulation by computer control of sputtering systems
VARIAN ASSOCIATES58 citations95
US4756815AJul 12, 1988
Wafer coating system
VARIAN ASSOCIATES46 citations92
US5605866AFeb 25, 1997
Clamp with wafer release for semiconductor wafer processing equipment
VARIAN ASSOCIATES30 citations91
US4313815AFeb 2, 1982
Sputter-coating system, and vaccuum valve, transport, and sputter source array arrangements therefor
VARIAN ASSOCIATES102 citations91
US5024747AJun 18, 1991
Wafer coating system
VARIAN ASSOCIATES27 citations89
US4436602AMar 13, 1984
Blocking shield and method for contouring the thickness of sputter coated layers
VARIAN ASSOCIATES23 citations81
US4416759ANov 22, 1983
Sputter system incorporating an improved blocking shield for contouring the thickness of sputter coated layers
VARIAN ASSOCIATES27 citations81
US4416760ANov 22, 1983
Apparatus for asymmetrically contouring the thickness of sputter coated layers
VARIAN ASSOCIATES14 citations73
US4392938AJul 12, 1983
Radio frequency etch table with biased extension member
VARIAN ASSOCIATES7 citations73