Inventor
ASPNES DAVID E
22 patents
⚠️ This page may combine multiple inventors who share the name “ASPNES DAVID E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
THERMA WAVE INC
13 patentsUS5973787AOct 26, 1999
Broadband spectroscopic rotating compensator ellipsometer
THERMA WAVE INC91 citations99
US5900939AMay 4, 1999
Thin film optical measurement system and method with calibrating ellipsometer
THERMA WAVE INC174 citations99
US5877859AMar 2, 1999
Broadband spectroscopic rotating compensator ellipsometer
THERMA WAVE INC202 citations99
US5798837AAug 25, 1998
Thin film optical measurement system and method with calibrating ellipsometer
THERMA WAVE INC233 citations99
US6411385B2Jun 25, 2002
Thin film optical measurement system and method with calibrating ellipsometer
THERMA WAVE INC54 citations96
US6320657B1Nov 20, 2001
Broadband spectroscopic rotating compensator ellipsometer
THERMA WAVE INC56 citations96
US6304326B1Oct 16, 2001
Thin film optical measurement system and method with calibrating ellipsometer
THERMA WAVE INC72 citations96
US6134012AOct 17, 2000
Broadband spectroscopic rotating compensator ellipsometer
THERMA WAVE INC50 citations96
US6831743B2Dec 14, 2004
Broadband spectroscopic rotating compensator ellipsometer
THERMA WAVE INC14 citations93
US6449043B2Sep 10, 2002
Broadband spectroscopic rotating compensator ellipsometer
THERMA WAVE INC21 citations93
US6181421B1Jan 30, 2001
Ellipsometer and polarimeter with zero-order plate compensator
THERMA WAVE INC44 citations87
US6650415B2Nov 18, 2003
Broadband spectroscopic rotating compensator ellipsometer
THERMA WAVE INC11 citations82
US7173700B2Feb 6, 2007
Normal incidence rotating compensator ellipsometer
THERMA WAVE INC9 citations74
BELL COMMUNICATIONS RES
3 patentsUS5091320AFeb 25, 1992
Ellipsometric control of material growth
BELL COMMUNICATIONS RES259 citations99
US4931132AJun 5, 1990
Optical control of deposition of crystal monolayers
BELL COMMUNICATIONS RES157 citations94
US5277747AJan 11, 1994
Extraction of spatially varying dielectric function from ellipsometric data
BELL COMMUNICATIONS RES47 citations92
BELL TELEPHONE LABOR INC
3 patentsUS4332833AJun 1, 1982
Method for optical monitoring in materials fabrication
BELL TELEPHONE LABOR INC89 citations96
US4357179ANov 2, 1982
Method for producing devices comprising high density amorphous silicon or germanium layers by low pressure CVD technique
BELL TELEPHONE LABOR INC100 citations95
US4380490AApr 19, 1983
Method of preparing semiconductor surfaces
BELL TELEPHONE LABOR INC10 citations66