Inventor

BANINE VADIM Y

NL6 patents

⚠️ This page may combine multiple inventors who share the name “BANINE VADIM Y”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

5 patents

US6452194B2Sep 17, 2002

Radiation source for use in lithographic projection apparatus

ASML NETHERLANDS BV88 citations92

US6456362B1Sep 24, 2002

Integrating waveguide for use in lithographic projection apparatus

ASML NETHERLANDS BV26 citations90

US6721389B2Apr 13, 2004

Lithographic apparatus, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV8 citations70

US7671965B2Mar 2, 2010

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

ASML NETHERLANDS BV2 citations61

US6714279B2Mar 30, 2004

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

ASML NETHERLANDS BV1 citations51

(unassigned)

1 patent

US6576912B2Jun 10, 2003

Lithographic projection apparatus equipped with extreme ultraviolet window serving simultaneously as vacuum window

128 citations95