Inventor
NIROOMAND ARDAVAN
US46 patents
⚠️ This page may combine multiple inventors who share the name “NIROOMAND ARDAVAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
37 patentsUS7732343B2Jun 8, 2010
Simplified pitch doubling process flow
MICRON TECHNOLOGY INC572 citations99
US7790360B2Sep 7, 2010
Methods of forming multiple lines
MICRON TECHNOLOGY INC60 citations98
US6383723B1May 7, 2002
Method to clean substrate and improve photoresist profile
MICRON TECHNOLOGY INC75 citations96
US6281100B1Aug 28, 2001
Semiconductor processing methods
MICRON TECHNOLOGY INC62 citations96
US7659208B2Feb 9, 2010
Method for forming high density patterns
MICRON TECHNOLOGY INC14 citations93
US6228740B1May 8, 2001
Method of making an antireflective structure
MICRON TECHNOLOGY INC19 citations93
US5990002ANov 23, 1999
Method of making an antireflective structure
MICRON TECHNOLOGY INC23 citations93
US5886391AMar 23, 1999
Antireflective structure
MICRON TECHNOLOGY INC27 citations93
US5259924ANov 9, 1993
Integrated circuit fabrication process to reduce critical dimension loss during etching
MICRON TECHNOLOGY INC27 citations93
US7902074B2Mar 8, 2011
Simplified pitch doubling process flow
MICRON TECHNOLOGY INC26 citations92
US7538036B2May 26, 2009
Methods of forming openings, and methods of forming container capacitors
MICRON TECHNOLOGY INC36 citations92
US7408265B2Aug 5, 2008
Use of a dual-tone resist to form photomasks including alignment mark protection, intermediate semiconductor device structures and bulk semiconductor device substrates
MICRON TECHNOLOGY INC28 citations92
US7321149B2Jan 22, 2008
Capacitor structures, and DRAM arrays
MICRON TECHNOLOGY INC34 citations92
US7153778B2Dec 26, 2006
Methods of forming openings, and methods of forming container capacitors
MICRON TECHNOLOGY INC34 citations92
US6815308B2Nov 9, 2004
Use of a dual-tone resist to form photomasks including alignment mark protection, intermediate semiconductor device structures and bulk semiconductor device substrates
MICRON TECHNOLOGY INC16 citations92
US6461950B2Oct 8, 2002
Semiconductor processing methods, semiconductor circuitry, and gate stacks
MICRON TECHNOLOGY INC16 citations92
US6451504B2Sep 17, 2002
Semiconductor processing method of promoting photoresist adhesion to an outer substrate layer predominately comprising silicon nitride
MICRON TECHNOLOGY INC19 citations92
US6107002AAug 22, 2000
Reducing resist shrinkage during device fabrication
MICRON TECHNOLOGY INC19 citations92
US5926739AJul 20, 1999
Semiconductor processing method of promoting photoresist adhesion to an outer substrate layer predominately comprising silicon nitride
MICRON TECHNOLOGY INC31 citations92
US10607844B2Mar 31, 2020
Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
MICRON TECHNOLOGY INC4 citations84
US10096483B2Oct 9, 2018
Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
MICRON TECHNOLOGY INC6 citations84
US9761457B2Sep 12, 2017
Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
MICRON TECHNOLOGY INC7 citations84
US9184159B2Nov 10, 2015
Simplified pitch doubling process flow
MICRON TECHNOLOGY INC7 citations84
US8039399B2Oct 18, 2011
Methods of forming patterns utilizing lithography and spacers
MICRON TECHNOLOGY INC15 citations84
US8003310B2Aug 23, 2011
Masking techniques and templates for dense semiconductor fabrication
MICRON TECHNOLOGY INC15 citations84
US7799694B2Sep 21, 2010
Methods of forming semiconductor constructions
MICRON TECHNOLOGY INC14 citations84
US9305782B2Apr 5, 2016
Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
MICRON TECHNOLOGY INC3 citations82
US8030217B2Oct 4, 2011
Simplified pitch doubling process flow
MICRON TECHNOLOGY INC5 citations74
US6693345B2Feb 17, 2004
Semiconductor wafer assemblies comprising photoresist over silicon nitride materials
MICRON TECHNOLOGY INC6 citations74
US6417559B1Jul 9, 2002
Semiconductor wafer assemblies comprising photoresist over silicon nitride materials
MICRON TECHNOLOGY INC10 citations74
US6323139B1Nov 27, 2001
Semiconductor processing methods of forming photoresist over silicon nitride materials
MICRON TECHNOLOGY INC5 citations74
US8871648B2Oct 28, 2014
Method for forming high density patterns
MICRON TECHNOLOGY INC2 citations63
US7057263B2Jun 6, 2006
Semiconductor wafer assemblies comprising photoresist over silicon nitride materials
MICRON TECHNOLOGY INC2 citations63
US6297171B1Oct 2, 2001
Semiconductor processing method of promoting photoresist adhesion to an outer substrate layer predominately comprising silicon nitride
MICRON TECHNOLOGY INC2 citations63
US11335563B2May 17, 2022
Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
MICRON TECHNOLOGY INC0 citations62
US7576400B1Aug 18, 2009
Circuitry and gate stacks
MICRON TECHNOLOGY INC1 citations62
US7821142B2Oct 26, 2010
Intermediate semiconductor device structures
MICRON TECHNOLOGY INC0 citations52
ALAPATI RAMAKANTH
3 patentsUS8598043B2Dec 3, 2013
Methods of forming semiconductor constructions
ALAPATI RAMAKANTH7 citations83
US8431456B2Apr 30, 2013
Methods of forming high density structures and low density structures with a single photomask
ALAPATI RAMAKANTH11 citations83
US8207570B2Jun 26, 2012
Semiconductor constructions
ALAPATI RAMAKANTH12 citations83
ZHOU BAOSUO
2 patentsLODESTAR LICENSING GROUP LLC
2 patentsUS12463044B2Nov 4, 2025
Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
LODESTAR LICENSING GROUP LLC0 citations62
US11935756B2Mar 19, 2024
Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
LODESTAR LICENSING GROUP LLC0 citations62