Inventor
SOMERVILLE LINDA K
US7 patents
⚠️ This page may combine multiple inventors who share the name “SOMERVILLE LINDA K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
6 patentsUS6281100B1Aug 28, 2001
Semiconductor processing methods
MICRON TECHNOLOGY INC62 citations96
US6461950B2Oct 8, 2002
Semiconductor processing methods, semiconductor circuitry, and gate stacks
MICRON TECHNOLOGY INC16 citations92
US6335531B1Jan 1, 2002
Modification of resist and/or resist processing with fluorescence detection
MICRON TECHNOLOGY INC16 citations79
US6403285B1Jun 11, 2002
Method for exposing semiconductor wafers in a manner that promotes radial processing uniformity
MICRON TECHNOLOGY INC9 citations72
US7576400B1Aug 18, 2009
Circuitry and gate stacks
MICRON TECHNOLOGY INC1 citations62
US6580493B2Jun 17, 2003
Method and apparatus for exposing semiconductor wafers in a manner that promotes radial processing uniformity
MICRON TECHNOLOGY INC0 citations51