Inventor
HARPER JAMES M E
US26 patents
Patents
26 patentsUS6150723ANov 21, 2000
Copper stud structure with refractory metal liner
IBM71 citations96
US4523971AJun 18, 1985
Programmable ion beam patterning system
IBM75 citations96
US4351712ASep 28, 1982
Low energy ion beam oxidation process
IBM67 citations96
US5243222ASep 7, 1993
Copper alloy metallurgies for VLSI interconnection structures
IBM83 citations95
US5130274AJul 14, 1992
Copper alloy metallurgies for VLSI interconnection structures
IBM97 citations95
US4381453AApr 26, 1983
System and method for deflecting and focusing a broad ion beam
IBM30 citations93
US4132614AJan 2, 1979
Etching by sputtering from an intermetallic target to form negative metallic ions which produce etching of a juxtaposed substrate
IBM33 citations93
US6300236B1Oct 9, 2001
Copper stud structure with refractory metal liner
IBM33 citations92
US5565236AOct 15, 1996
Method of forming a giant magnetoresistance sensor
IBM28 citations92
US5422621AJun 6, 1995
Oriented granular giant magnetoresistance sensor
IBM32 citations92
US4446403AMay 1, 1984
Compact plug connectable ion source
IBM43 citations92
US4379218AApr 5, 1983
Fluxless ion beam soldering process
IBM33 citations92
US4259145AMar 31, 1981
Ion source for reactive ion etching
IBM47 citations92
US5510295AApr 23, 1996
Method for lowering the phase transformation temperature of a metal silicide
IBM47 citations91
US5143867ASep 1, 1992
Method for depositing interconnection metallurgy using low temperature alloy processes
IBM31 citations91
US4419203ADec 6, 1983
Apparatus and method for neutralizing ion beams
IBM37 citations91
US5634973AJun 3, 1997
Low temperature selective growth of silicon or silicon alloys
IBM13 citations82
US4424104AJan 3, 1984
Single axis combined ion and vapor source
IBM18 citations81
US7271486B2Sep 18, 2007
Retarding agglomeration of Ni monosilicide using Ni alloys
IBM7 citations74
US6905560B2Jun 14, 2005
Retarding agglomeration of Ni monosilicide using Ni alloys
IBM10 citations74
US4538067AAug 27, 1985
Single grid focussed ion beam source
IBM10 citations69
US5418188AMay 23, 1995
Method for controlled positioning of a compound layer in a multilayer device
IBM7 citations68
US5595600AJan 21, 1997
Low temperature selective growth of silicon or silicon alloys
IBM1 citations63
US5565031AOct 15, 1996
Method for low temperature selective growth of silicon or silicon alloys
IBM2 citations63
US5427630AJun 27, 1995
Mask material for low temperature selective growth of silicon or silicon alloys
IBM3 citations63
US4264813AApr 28, 1981
High intensity ion source using ionic conductors
IBM4 citations61