P

Inventor

BOGGS KARL E

US13 patents
⚠️ This page may combine multiple inventors who share the name “BOGGS KARL E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

7 patents
US6087191AJul 11, 2000

Method for repairing surface defects

IBM28 citations92
US6325696B1Dec 4, 2001

Piezo-actuated CMP carrier

IBM50 citations91
US5972787AOct 26, 1999

CMP process using indicator areas to determine endpoint

IBM20 citations89
US6296717B1Oct 2, 2001

Regeneration of chemical mechanical polishing pads in-situ

IBM12 citations73
US6102776AAug 15, 2000

Apparatus and method for controlling polishing of integrated circuit substrates

IBM15 citations72
US6106374AAug 22, 2000

Acoustically agitated delivery

IBM9 citations66
US6857434B2Feb 22, 2005

CMP slurry additive for foreign matter detection

IBM2 citations58

ADVANCED TECH MATERIALS

1 patent
US7361603B2Apr 22, 2008

Passivative chemical mechanical polishing composition for copper film planarization

ADVANCED TECH MATERIALS25 citations92

BARNES JEFFREY A

1 patent
US9074170B2Jul 7, 2015

Copper cleaning and protection formulations

BARNES JEFFREY A26 citations90

BOGGS KARL E

1 patent
US8304344B2Nov 6, 2012

High throughput chemical mechanical polishing composition for metal film planarization

BOGGS KARL E26 citations88

LIU JUN

1 patent
US8236695B2Aug 7, 2012

Method of passivating chemical mechanical polishing compositions for copper film planarization processes

LIU JUN11 citations84

AFZALI-ARDAKANI ALI

1 patent
US8618036B2Dec 31, 2013

Aqueous cerium-containing solution having an extended bath lifetime for removing mask material

AFZALI-ARDAKANI ALI11 citations83

CHEN TIANNIU

1 patent
US9074169B2Jul 7, 2015

Lithographic tool in situ clean formulations

CHEN TIANNIU10 citations80