Inventor
PLOESSL ROBERT
US7 patents
⚠️ This page may combine multiple inventors who share the name “PLOESSL ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SIEMENS AG
4 patentsUS5885137AMar 23, 1999
Chemical mechanical polishing pad conditioner
SIEMENS AG126 citations95
US6124206ASep 26, 2000
Reduced pad erosion
SIEMENS AG25 citations88
US5907771AMay 25, 1999
Reduction of pad erosion
SIEMENS AG10 citations65
US6051497AApr 18, 2000
Formation of sub-groundrule features
SIEMENS AG6 citations60