Inventor
NGUYEN BANG
US12 patents
⚠️ This page may combine multiple inventors who share the name “NGUYEN BANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS5994209ANov 30, 1999
Methods and apparatus for forming ultra-shallow doped regions using doped silicon oxide films
APPLIED MATERIALS INC161 citations98
US6121164ASep 19, 2000
Method for forming low compressive stress fluorinated ozone/TEOS oxide film
APPLIED MATERIALS INC59 citations96
US6099647AAug 8, 2000
Methods and apparatus for forming ultra-shallow doped regions using doped silicon oxide films
APPLIED MATERIALS INC53 citations95
US5356722AOct 18, 1994
Method for depositing ozone/TEOS silicon oxide films of reduced surface sensitivity
APPLIED MATERIALS INC84 citations95
US6599574B1Jul 29, 2003
Method and apparatus for forming a dielectric film using helium as a carrier gas
APPLIED MATERIALS INC25 citations91