Inventor
SKROVAN JOHN K
US7 patents
Patents
7 patentsUS6090475AJul 18, 2000
Polishing pad, methods of manufacturing and use
MICRON TECHNOLOGY INC139 citations98
US6062958AMay 16, 2000
Variable abrasive polishing pad for mechanical and chemical-mechanical planarization
MICRON TECHNOLOGY INC116 citations98
US6309282B1Oct 30, 2001
Variable abrasive polishing pad for mechanical and chemical-mechanical planarization
MICRON TECHNOLOGY INC85 citations97
US6186870B1Feb 13, 2001
Variable abrasive polishing pad for mechanical and chemical-mechanical planarization
MICRON TECHNOLOGY INC87 citations97
US6136043AOct 24, 2000
Polishing pad methods of manufacture and use
MICRON TECHNOLOGY INC107 citations97
US7276765B2Oct 2, 2007
Buried transistors for silicon on insulator technology
MICRON TECHNOLOGY INC0 citations52
US6900500B2May 31, 2005
Buried transistors for silicon on insulator technology
MICRON TECHNOLOGY INC1 citations52