Inventor
ITO NOBUKAZU
JP16 patents
⚠️ This page may combine multiple inventors who share the name “ITO NOBUKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
9 patentsUS6309970B1Oct 30, 2001
Method of forming multi-level copper interconnect with formation of copper oxide on exposed copper surface
NEC CORP36 citations92
US5543357AAug 6, 1996
Process of manufacturing a semiconductor device by filling a via hole in an interlayered film of the device with wiring metal
NEC CORP27 citations92
US5155063AOct 13, 1992
Method of fabricating semiconductor device including an al/tin/ti contact
NEC CORP29 citations92
US6465354B1Oct 15, 2002
Method of improving the planarization of wiring by CMP
NEC CORP10 citations73
US6372114B1Apr 16, 2002
Method of forming a semiconductor device
NEC CORP5 citations73
US6268090B1Jul 31, 2001
Process for manufacturing semiconductor device and exposure mask
NEC CORP14 citations73
US7462921B2Dec 9, 2008
Integrated circuit device, method of manufacturing the same and method of forming vanadium oxide film
NEC CORP2 citations62
US7239002B2Jul 3, 2007
Integrated circuit device
NEC CORP6 citations62
US6512281B2Jan 28, 2003
Method of forming a semiconductor device and an improved deposition system
NEC CORP1 citations51
NEC ELECTRONICS CORP
4 patentsUS6573607B2Jun 3, 2003
Semiconductor device and manufacturing method thereof
NEC ELECTRONICS CORP17 citations92
US7741692B2Jun 22, 2010
Integrated circuit device with temperature monitor members
NEC ELECTRONICS CORP2 citations62
US7391092B2Jun 24, 2008
Integrated circuit including a temperature monitor element and thermal conducting layer
NEC ELECTRONICS CORP5 citations62
US7777288B2Aug 17, 2010
Integrated circuit device and fabrication method therefor
NEC ELECTRONICS CORP0 citations41
NIKON CORP
3 patentsUS6538719B1Mar 25, 2003
Exposure apparatus and exposure method, and device and method for producing the same
NIKON CORP62 citations96
US6252234B1Jun 26, 2001
Reaction force isolation system for a planar motor
NIKON CORP55 citations96
US6317221B1Nov 13, 2001
Image reading device and method
NIKON CORP13 citations71