Inventor
COMER WAYLAND
US4 patents
Patents
4 patentsUS6368411B2Apr 9, 2002
Molecular contamination control system
SEMIFAB INC104 citations98
US5879458AMar 9, 1999
Molecular contamination control system
SEMIFAB INC168 citations98
US6221163B1Apr 24, 2001
Molecular contamination control system
SEMIFAB INC70 citations95
US6042651AMar 28, 2000
Molecular contamination control system
SEMIFAB INC82 citations95