Inventor
MATSUBARA KOJI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “MATSUBARA KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NAT INST OF ADVANCED IND SCIEN
6 patentsUS6649434B2Nov 18, 2003
Method of manufacturing semiconductor device having ZnO based oxide semiconductor layer
NAT INST OF ADVANCED IND SCIEN27 citations92
US6638846B2Oct 28, 2003
Method of growing p-type ZnO based oxide semiconductor layer and method of manufacturing semiconductor light emitting device
NAT INST OF ADVANCED IND SCIEN34 citations92
US6531408B2Mar 11, 2003
Method for growing ZnO based oxide semiconductor layer and method for manufacturing semiconductor light emitting device using the same
NAT INST OF ADVANCED IND SCIEN14 citations83
US6472241B2Oct 29, 2002
Radical cell device and method for manufacturing groups II-VI compound semiconductor device
NAT INST OF ADVANCED IND SCIEN7 citations73
US6770913B2Aug 3, 2004
ZnOSSe compound semiconductor, integrated circuit using the semiconductor and method of manufacturing the semiconductor and the integrated circuit
NAT INST OF ADVANCED IND SCIEN4 citations62
US8012546B2Sep 6, 2011
Method and apparatus for producing semiconductor films and related devices
NAT INST OF ADVANCED IND SCIEN4 citations60