Inventor
MURATE MAKOTO
JP8 patents
Patents
8 patentsUS5659138AAug 19, 1997
Surface type acceleration sensor
TOKAI RIKA CO LTD20 citations92
US6336658B1Jan 8, 2002
Acceleration switch and the manufacturing method
TOKAI RIKA CO LTD19 citations83
US6617191B1Sep 9, 2003
Method for anodizing silicon substrates for surface type acceleration sensors
TOKAI RIKA CO LTD11 citations73
US6399410B1Jun 4, 2002
Method of anodizing silicon substrate and method of producing acceleration sensor
TOKAI RIKA CO LTD8 citations73
US6080944AJun 27, 2000
Acceleration actuated microswitch
TOKAI RIKA CO LTD12 citations73
US5665250ASep 9, 1997
Method of manufacturing surface type acceleration sensor method of manufacturing
TOKAI RIKA CO LTD13 citations73
US6586691B2Jul 1, 2003
Acceleration switch
TOKAI RIKA CO LTD7 citations72
US6362079B1Mar 26, 2002
Semiconductor device and method of anodization for the semiconductor device
TOKAI RIKA CO LTD4 citations62