Inventor

OSTROWSKI KIRK

US3 patents

⚠️ This page may combine multiple inventors who share the name “OSTROWSKI KIRK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

1 patent

US6693043B1Feb 17, 2004

Method for removing photoresist from low-k films in a downstream plasma system

NOVELLUS SYSTEMS INC56 citations90

CHEUNG DAVID

1 patent

US8591661B2Nov 26, 2013

Low damage photoresist strip method for low-K dielectrics

CHEUNG DAVID7 citations80

SHAVIV ROEY

1 patent

US9613825B2Apr 4, 2017

Photoresist strip processes for improved device integrity

SHAVIV ROEY2 citations67