Inventor
HOVEY STEVEN H
US8 patents
⚠️ This page may combine multiple inventors who share the name “HOVEY STEVEN H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INNOVATIVE MICRO TECHNOLOGY
5 patentsUS7220594B2May 22, 2007
Method and apparatus for sorting particles with a MEMS device
INNOVATIVE MICRO TECHNOLOGY76 citations97
US7229838B2Jun 12, 2007
MEMS actuator and method of manufacture for MEMS particle sorting device
INNOVATIVE MICRO TECHNOLOGY47 citations92
US7972683B2Jul 5, 2011
Wafer bonding material with embedded conductive particles
INNOVATIVE MICRO TECHNOLOGY21 citations89
US7968986B2Jun 28, 2011
Lid structure for microdevice and method of manufacture
INNOVATIVE MICRO TECHNOLOGY8 citations83
US7675162B2Mar 9, 2010
Interconnect structure using through wafer vias and method of fabrication
INNOVATIVE MICRO TECHNOLOGY17 citations83
FIDELICA MICROSYSTEMS INC
3 patentsUS6578436B1Jun 17, 2003
Method and apparatus for pressure sensing
FIDELICA MICROSYSTEMS INC48 citations94
US7059201B2Jun 13, 2006
Use of multi-layer thin films as stress sensors
FIDELICA MICROSYSTEMS INC22 citations92
US6829950B2Dec 14, 2004
Method and apparatus for pressure sensing
FIDELICA MICROSYSTEMS INC17 citations90