Inventor

SPOONER TERRY

US5 patents

⚠️ This page may combine multiple inventors who share the name “SPOONER TERRY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

2 patents

US6917108B2Jul 12, 2005

Reliable low-k interconnect structure with hybrid dielectric

IBM49 citations95

US7135398B2Nov 14, 2006

Reliable low-k interconnect structure with hybrid dielectric

IBM18 citations91

ST MICROELECTRONICS INC

2 patents

US9466563B2Oct 11, 2016

Interconnect structure for an integrated circuit and method of fabricating an interconnect structure

ST MICROELECTRONICS INC7 citations82

US9658523B2May 23, 2017

Interconnect structure having large self-aligned vias

ST MICROELECTRONICS INC0 citations51

INFINEON TECHNOLOGIES CORP

1 patent

US6784105B1Aug 31, 2004

Simultaneous native oxide removal and metal neutral deposition method

INFINEON TECHNOLOGIES CORP45 citations91