Inventor
ANGYAL MATTHEW S
US16 patents
⚠️ This page may combine multiple inventors who share the name “ANGYAL MATTHEW S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
12 patentsUS6917108B2Jul 12, 2005
Reliable low-k interconnect structure with hybrid dielectric
IBM49 citations95
US8927442B1Jan 6, 2015
SiCOH hardmask with graded transition layers
IBM33 citations92
US7093206B2Aug 15, 2006
Computer aided design method and apparatus for modeling and analyzing on-chip interconnect structures
IBM30 citations92
US7135398B2Nov 14, 2006
Reliable low-k interconnect structure with hybrid dielectric
IBM18 citations91
US9455186B2Sep 27, 2016
Selective local metal cap layer formation for improved electromigration behavior
IBM4 citations84
US7544609B2Jun 9, 2009
Method for integrating liner formation in back end of line processing
IBM9 citations84
US9859208B1Jan 2, 2018
Bottom self-aligned via
IBM2 citations73
US9385038B2Jul 5, 2016
Selective local metal cap layer formation for improved electromigration behavior
IBM2 citations63
US9076847B2Jul 7, 2015
Selective local metal cap layer formation for improved electromigration behavior
IBM1 citations63
US7214608B2May 8, 2007
Interlevel dielectric layer and metal layer sealing
IBM4 citations62
US7475368B2Jan 6, 2009
Deflection analysis system and method for circuit design
IBM3 citations61
US9406560B2Aug 2, 2016
Selective local metal cap layer formation for improved electromigration behavior
IBM0 citations52
ANGYAL MATTHEW S
3 patentsUS8188574B2May 29, 2012
Pedestal guard ring having continuous M1 metal barrier connected to crack stop
ANGYAL MATTHEW S21 citations91
US8237246B2Aug 7, 2012
Deep trench crackstops under contacts
ANGYAL MATTHEW S7 citations82
US8450212B2May 28, 2013
Method of reducing critical dimension process bias differences between narrow and wide damascene wires
ANGYAL MATTHEW S4 citations54