Inventor
KAI YOSHITAKA
JP4 patents
Patents
4 patentsUS7476073B2Jan 13, 2009
Vacuum processing method
HITACHI HIGH TECH CORP2 citations58
US7112805B2Sep 26, 2006
Vacuum processing apparatus and vacuum processing method
HITACHI HIGH TECH CORP1 citations50
US8033770B2Oct 11, 2011
Vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations48
US7862289B2Jan 4, 2011
Vacuum processing apparatus and vacuum processing method
HITACHI HIGH TECH CORP0 citations48