P

Inventor

NISHIMORI YASUHIRO

JP15 patents
⚠️ This page may combine multiple inventors who share the name “NISHIMORI YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

4 patents
US11152192B2Oct 19, 2021

Plasma processing apparatus and method

HITACHI HIGH TECH CORP0 citations51
US7112805B2Sep 26, 2006

Vacuum processing apparatus and vacuum processing method

HITACHI HIGH TECH CORP1 citations50
US9899241B2Feb 20, 2018

Plasma processing method

HITACHI HIGH TECH CORP0 citations48
US7909933B2Mar 22, 2011

Plasma processing method

HITACHI HIGH TECH CORP1 citations48

HITACHI LTD

3 patents
US6677244B2Jan 13, 2004

Specimen surface processing method

HITACHI LTD18 citations92
US6492277B1Dec 10, 2002

Specimen surface processing method and apparatus

HITACHI LTD4 citations63
US7049243B2May 23, 2006

Surface processing method of a specimen and surface processing apparatus of the specimen

HITACHI LTD0 citations52

DAIHEN CORP

2 patents
US6946847B2Sep 20, 2005

Impedance matching device provided with reactance-impedance table

DAIHEN CORP219 citations97
US6291999B1Sep 18, 2001

Plasma monitoring apparatus

DAIHEN CORP100 citations97

WATANABE SEIICHI

1 patent
US8075733B2Dec 13, 2011

Plasma processing apparatus

WATANABE SEIICHI11 citations82

MIYAMOTO AKIRA

1 patent
US8203101B2Jun 19, 2012

Conveying device

MIYAMOTO AKIRA9 citations81

HIROTA KOUSA

1 patent
US8114244B2Feb 14, 2012

Method for etching a sample

HIROTA KOUSA2 citations55

OHMORI TAKESHI

1 patent
US8486291B2Jul 16, 2013

Plasma processing method

OHMORI TAKESHI0 citations44

ISHIHARA MASUNORI

1 patent
US8277563B2Oct 2, 2012

Plasma processing method

ISHIHARA MASUNORI0 citations41

YAMADA TAKAYA

1 patent
US8931294B2Jan 13, 2015

Cooling unit and work piece conveying equipment using it

YAMADA TAKAYA0 citations39