Inventor
ADIBI BABAK
US24 patents
⚠️ This page may combine multiple inventors who share the name “ADIBI BABAK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEVAC INC
13 patentsUS9303314B2Apr 5, 2016
Ion implant system having grid assembly
INTEVAC INC4 citations83
US9324598B2Apr 26, 2016
Substrate processing system and method
INTEVAC INC7 citations82
US9741894B2Aug 22, 2017
Ion implant system having grid assembly
INTEVAC INC2 citations72
US9543114B2Jan 10, 2017
Implant masking and alignment system with rollers
INTEVAC INC4 citations72
US9318332B2Apr 19, 2016
Grid for plasma ion implant
INTEVAC INC4 citations72
US9875922B2Jan 23, 2018
Substrate processing system and method
INTEVAC INC3 citations71
US11255013B2Feb 22, 2022
Ion implantation for modification of thin film coatings on glass
INTEVAC INC0 citations62
US9850570B2Dec 26, 2017
Ion implantation for modification of thin film coatings on glass
INTEVAC INC0 citations52
US10854772B2Dec 1, 2020
Multi-piece substrate holder and alignment mechanism
INTEVAC INC0 citations51
US10636935B2Apr 28, 2020
Ion implant system having grid assembly
INTEVAC INC0 citations51
US9583661B2Feb 28, 2017
Grid for plasma ion implant
INTEVAC INC0 citations51
US10446430B2Oct 15, 2019
Patterned chuck for substrate processing
INTEVAC INC0 citations50
US10559710B2Feb 11, 2020
System of height and alignment rollers for precise alignment of wafers for ion implantation
INTEVAC INC0 citations49
APPLIED MATERIALS INC
5 patentsUS5932882AAug 3, 1999
Ion implanter with post mass selection deceleration
APPLIED MATERIALS INC75 citations96
US5883391AMar 16, 1999
Ion implantation apparatus and a method of monitoring high energy neutral contamination in an ion implantation process
APPLIED MATERIALS INC51 citations96
US7225047B2May 29, 2007
Method, system and medium for controlling semiconductor wafer processes using critical dimension measurements
APPLIED MATERIALS INC46 citations92
US6093625AJul 25, 2000
Apparatus for and methods of implanting desired chemical species in semiconductor substrates
APPLIED MATERIALS INC70 citations91
US6200883B1Mar 13, 2001
Ion implantation method
APPLIED MATERIALS INC33 citations90
ADIBI BABAK
5 patentsUS8697552B2Apr 15, 2014
Method for ion implant using grid assembly
ADIBI BABAK13 citations91
US8697553B2Apr 15, 2014
Solar cell fabrication with faceting and ion implantation
ADIBI BABAK23 citations89
US8997688B2Apr 7, 2015
Ion implant system having grid assembly
ADIBI BABAK9 citations82
US8749053B2Jun 10, 2014
Plasma grid implant system for use in solar cell fabrications
ADIBI BABAK7 citations82
US8871619B2Oct 28, 2014
Application specific implant system and method for use in solar cell fabrications
ADIBI BABAK7 citations81