Inventor
VIOLETTE KEVIN J
US9 patents
⚠️ This page may combine multiple inventors who share the name “VIOLETTE KEVIN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
8 patentsUS7021119B2Apr 4, 2006
Liquid flow proximity sensor for use in immersion lithography
ASML HOLDING NV22 citations90
US7010958B2Mar 14, 2006
High-resolution gas gauge proximity sensor
ASML HOLDING NV21 citations89
US7124624B2Oct 24, 2006
High-resolution gas gauge proximity sensor
ASML HOLDING NV10 citations71
US10670978B2Jun 2, 2020
Method and apparatus for spectrally broadening radiation
ASML HOLDING NV4 citations70
US10082740B2Sep 25, 2018
Feedback control system of an alignment system
ASML HOLDING NV3 citations70
US7472579B2Jan 6, 2009
Liquid flow proximity sensor for use in immersion lithography
ASML HOLDING NV2 citations60
US10481507B2Nov 19, 2019
Measurement method comprising in-situ printing of apparatus mark and corresponding apparatus
ASML HOLDING NV0 citations50
US7508514B2Mar 24, 2009
Correction of off-axis translation of optical elements in an optical zoom assembly
ASML HOLDING NV0 citations50